Proceedings will be published in the special issue of Materials Science in Semiconductor Processing, published by Elsevier. Authors of accepted abstracts are encouraged to submit their original papers on the significant part of their work presented at ISCSI-X & ICSI/ISTDM 2025.
Tentatively, the submission site will open on October 1, 2025, and the deadline of the paper submission is December 31, 2025.
The details will be announced on this web page.